Atomic layers deposited nano-mechanical resonators for silicon photonics

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Authors
Rajendran, Khannan; Petit, R.; Detavernier, C.; Van Thourhout, Dries
Conference
Frontiers of Nanomechanical Systems Workshop 2021
Title
Atomic layers deposited nano-mechanical resonators for silicon photonics
Publication type
Oral presentation
Embargo date
9999-12-31
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