Publication:
Atomic layers deposited nano-mechanical resonators for silicon photonics
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2154 since deposited on 2021-10-31
1last month
1last week
Acq. date: 2026-09-12
Citations
Statistics
Views
2154 since deposited on 2021-10-31
1last month
1last week
Acq. date: 2026-09-12
Citations