dc.contributor.author | Van der Plas, Geert | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-31T11:57:50Z | |
dc.date.available | 2021-10-31T11:57:50Z | |
dc.date.issued | 2021 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37280 | |
dc.source | IIOimport | |
dc.title | Design and technology solutions for 3D integrated high performance systems | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Van der Plas, Geert | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | yes | |
dc.source.conference | 2021 Symposia on VLSI Technology | |
dc.source.conferencedate | 13/06/2021 | |
dc.source.conferencelocation | Kyoto Japan | |
dc.identifier.url | https://ieeexplore.ieee.org/document/9508698 | |
imec.availability | Published - imec | |