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dc.contributor.authorVan der Plas, Geert
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-31T11:57:50Z
dc.date.available2021-10-31T11:57:50Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37280
dc.sourceIIOimport
dc.titleDesign and technology solutions for 3D integrated high performance systems
dc.typeProceedings paper
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.conference2021 Symposia on VLSI Technology
dc.source.conferencedate13/06/2021
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9508698
imec.availabilityPublished - imec


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