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Enabling Logic with Backside Connectivity via n-TSVs and its Potential as a Scaling Booster

dc.contributor.authorVeloso, Anabela
dc.contributor.authorJourdain, Anne
dc.contributor.authorHiblot, Gaspard
dc.contributor.authorSchleicher, Filip
dc.contributor.authorD'have, Koen
dc.contributor.authorSebaai, Farid
dc.contributor.authorRadisic, Dunja
dc.contributor.authorLoo, Roger
dc.contributor.authorHopf, Toby
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorEneman, Geert
dc.contributor.authorFavia, Paola
dc.contributor.authorGeypen, Jef
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorJang, Doyoung
dc.contributor.authorNyns, Laura
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMannaert, Geert
dc.contributor.authorChan, BT
dc.contributor.authorDevriendt, Katia
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorRyckaert, Julien
dc.contributor.authorBeyer, Gerald
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorBeyne, Eric
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-31T12:24:17Z
dc.date.available2021-10-31T12:24:17Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37335
dc.sourceIIOimport
dc.titleEnabling Logic with Backside Connectivity via n-TSVs and its Potential as a Scaling Booster
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorD'have, Koen
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecD'have, Koen::0000-0002-5195-9241
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conference2021 Symposium on VLSI Technology
dc.source.conferencedate13/06/2021
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9508684
imec.availabilityPublished - imec


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