Notice

This item has not yet been validated by imec staff.

Notice

This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/37471.7

Show simple item record

Special Series Guest Editorial: EUV Masks

dc.contributor.authorBurkhardt, Martin
dc.contributor.authorPhilipsen, Vicky
dc.date.accessioned2022-03-28T11:51:37Z
dc.date.available2021-11-02T15:55:45Z
dc.date.available2022-03-28T11:51:37Z
dc.date.issued2021
dc.identifier.issn1932-5150
dc.identifier.otherWOS:000703599200003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37471.2
dc.sourceWOS
dc.titleSpecial Series Guest Editorial: EUV Masks
dc.typeEditorial material
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.identifier.doi10.1117/1.JMM.20.3.031008
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.issue3
dc.source.volume20
imec.availabilityUnder review


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
720.500.12860/37471.72022-04-21T08:10:42Zvalidation by library/open access desk
620.500.12860/37471.62022-04-19T08:43:32Zvalidation by imec author
420.500.12860/37471.42022-04-11T06:46:54Zvalidation by imec author
320.500.12860/37471.32022-04-08T08:41:40Zvalidation by imec author
220.500.12860/37471.2*2022-03-28T11:49:25Zvalidation by imec author
120.500.12860/374712021-11-02T15:55:45Z

*Selected version