Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars
dc.contributor.author | Boninelli, S. | |
dc.contributor.author | Calabretta, C. | |
dc.contributor.author | Mancarella, F. | |
dc.contributor.author | Mauceri, M. | |
dc.contributor.author | Crippa, D. | |
dc.contributor.author | Albani, M. | |
dc.contributor.author | Bergamaschini, R. | |
dc.contributor.author | Miglio, L. | |
dc.contributor.author | La Via, F. | |
dc.contributor.author | Agati, Marta | |
dc.date.accessioned | 2021-12-03T10:20:18Z | |
dc.date.available | 2021-11-02T15:57:50Z | |
dc.date.available | 2021-12-03T10:20:18Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0264-1275 | |
dc.identifier.other | WOS:000684813700005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37641.2 | |
dc.source | WOS | |
dc.title | Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars | |
dc.type | Journal article | |
dc.contributor.imecauthor | Agati, Marta | |
dc.contributor.orcidext | Albani, M.::0000-0002-8811-7574 | |
dc.identifier.doi | 10.1016/j.matdes.2021.109833 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 109833 | |
dc.source.journal | MATERIALS & DESIGN | |
dc.source.issue | na | |
dc.source.volume | 208 | |
imec.availability | Published - open access |