Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

Boninelli, S.; Calabretta, C.; Mancarella, F.; Mauceri, M.; Crippa, D.; Albani, M.; Bergamaschini, R.; Miglio, L.; La Via, F.; Agati, Marta

doi:10.1016/j.matdes.2021.109833

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Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

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2021

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https://doi.org/10.1016/j.matdes.2021.109833

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MATERIALS & DESIGN

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Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

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