Publication:

Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

Date

2021
Journal article
https://doi.org/10.1016/j.matdes.2021.109833
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dc.contributor.authorBoninelli, S.
dc.contributor.authorCalabretta, C.
dc.contributor.authorMancarella, F.
dc.contributor.authorMauceri, M.
dc.contributor.authorCrippa, D.
dc.contributor.authorAlbani, M.
dc.contributor.authorBergamaschini, R.
dc.contributor.authorMiglio, L.
dc.contributor.authorLa Via, F.
dc.contributor.authorAgati, Marta
dc.contributor.imecauthorAgati, Marta
dc.contributor.orcidextAlbani, M.::0000-0002-8811-7574
dc.date.accessioned2021-12-03T10:20:18Z
dc.date.available2021-11-02T15:57:50Z
dc.date.available2021-12-03T10:20:18Z
dc.date.issued2021
dc.identifier.doi10.1016/j.matdes.2021.109833
dc.identifier.issn0264-1275
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37641
dc.publisherELSEVIER SCI LTD
dc.source.beginpage109833
dc.source.issuena
dc.source.journalMATERIALS & DESIGN
dc.source.numberofpages11
dc.source.volume208
dc.subject.keywordsEPITAXIAL-GROWTH
dc.subject.keywordsSILICON
dc.subject.keywordsFABRICATION
dc.subject.keywordsDEFECTS
dc.title

Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

dc.typeJournal article
dspace.entity.typePublication
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