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Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond

dc.contributor.authorNa, Myung Hee
dc.contributor.authorJang, Doyoung
dc.contributor.authorBaert, Rogier
dc.contributor.authorSarkar, Satadru
dc.contributor.authorPatli, Sudhir
dc.contributor.authorZografos, Odysseas
dc.contributor.authorChehab, Bilal
dc.contributor.authorSpessot, Alessio
dc.contributor.authorSisto, Giuliano
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorMertens, Hans
dc.contributor.authorOniki, Yusuke
dc.contributor.authorHellings, Geert
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorRyckaert, Julien
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-12-07T08:25:05Z
dc.date.available2021-11-02T15:58:13Z
dc.date.available2021-12-07T08:25:05Z
dc.date.issued2021
dc.identifier.issnna
dc.identifier.otherWOS:000675595800161
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37667.2
dc.sourceWOS
dc.titleDisruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond
dc.typeProceedings paper
dc.contributor.imecauthorNa, Myung Hee
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorSarkar, Satadru
dc.contributor.imecauthorPatli, Sudhir
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorSisto, Giuliano
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidextSisto, G.::0000-0001-8706-4311
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.doi10.1109/EDTM50988.2021.9420975
dc.identifier.eisbn978-1-7281-8176-9
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedateAPR 08-11, 2021
dc.source.conferencelocationChengdu
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/37667.2*2021-12-07T08:18:29Zvalidation by library/open access desk
120.500.12860/376672021-11-02T15:58:13Z

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