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Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond
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Authors
Na, Myung Hee
;
Jang, Doyoung
;
Baert, Rogier
;
Sarkar, Satadru
;
Patli, Sudhir
;
Zografos, Odysseas
;
Chehab, Bilal
;
Spessot, Alessio
;
Sisto, Giuliano
;
Schuddinck, Pieter
;
Mertens, Hans
;
Oniki, Yusuke
;
Hellings, Geert
;
Dentoni Litta, Eugenio
;
Ryckaert, Julien
;
Horiguchi, Naoto
DOI
10.1109/EDTM50988.2021.9420975
EISBN
978-1-7281-8176-9
ISSN
na
Conference
5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
Journal
na
Title
Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond
Publication type
Proceedings paper
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Version
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Date
Summary
2
20.500.12860/37667.2
*
2021-12-07T08:18:29Z
validation by library/open access desk
1
20.500.12860/37667
2021-11-02T15:58:13Z
*Selected version
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