Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond

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dc.contributor.author	Na, M. H.
dc.contributor.author	Jang, D.
dc.contributor.author	Baert, R.
dc.contributor.author	Sarkar, S.
dc.contributor.author	Patli, S.
dc.contributor.author	Zografos, O.
dc.contributor.author	Chehab, B.
dc.contributor.author	Spessot, A.
dc.contributor.author	Sisto, G.
dc.contributor.author	Schuddinck, P.
dc.contributor.author	Mertens, H.
dc.contributor.author	Oniki, Y.
dc.contributor.author	Hellings, G.
dc.contributor.author	Litta, E. Dentoni
dc.contributor.author	Ryckaert, J.
dc.contributor.author	Horiguchi, N.
dc.date.accessioned	2021-11-02T15:58:13Z
dc.date.available	2021-11-02T15:58:13Z
dc.date.issued	2021
dc.identifier.other	WOS:000675595800161
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/37667
dc.source	WOS
dc.title	Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond
dc.type	Proceedings paper
dc.contributor.orcidext	Sisto, G.::0000-0001-8706-4311
dc.identifier.doi	10.1109/EDTM50988.2021.9420975
dc.identifier.eisbn	978-1-7281-8176-9
dc.source.numberofpages	3
dc.source.peerreview	yes
dc.source.conference	5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedate	APR 08-11, 2021
dc.source.conferencelocation	Chengdu
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/37667.2	2021-12-07T08:18:29Z	validation by library/open access desk
1	20.500.12860/37667*	2021-11-02T15:58:13Z