Effect of Cu on Al interfacial mass transport in bamboo rie and damscene (AlCu)

Thumbnail
Metadata
Show full item record
Authors
Proost, Joris; Li, H.; Witvrouw, Ann; Maex, Karen
Conference
Materials Reliability in Microelectronics IX; 5-9 April 1999; San Francisco, Ca, USA.
Title
Effect of Cu on Al interfacial mass transport in bamboo rie and damscene (AlCu)
Publication type
Proceedings paper
Collections