Reliability of Mo as Word Line Metal in 3D NAND

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dc.contributor.author	Tierno, D.
dc.contributor.author	Croes, K.
dc.contributor.author	Ajaykumar, A.
dc.contributor.author	Ramesh, S.
dc.contributor.author	Van den Bosch, G.
dc.contributor.author	Rosmeulen, M.
dc.date.accessioned	2021-11-02T15:58:24Z
dc.date.available	2021-11-02T15:58:24Z
dc.date.issued	2021
dc.identifier.issn	1541-7026
dc.identifier.other	WOS:000672563100044
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/37681
dc.source	WOS
dc.title	Reliability of Mo as Word Line Metal in 3D NAND
dc.type	Proceedings paper
dc.contributor.imecauthor	Tierno, D.
dc.contributor.imecauthor	Croes, K.
dc.contributor.imecauthor	Ajaykumar, A.
dc.contributor.imecauthor	Ramesh, S.
dc.contributor.imecauthor	Van den Bosch, G.
dc.contributor.imecauthor	Rosmeulen, M.
dc.contributor.orcidimec	Tierno, D.::0000-0003-4915-904X
dc.identifier.doi	10.1109/IRPS46558.2021.9405132
dc.identifier.eisbn	978-1-7281-6893-7
dc.source.numberofpages	6
dc.source.peerreview	yes
dc.source.conference	IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedate	MAR 21-24, 2021
imec.availability	Under review

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Version	Item	Date	Summary
3	20.500.12860/37681.3	2022-06-09T07:08:44Z	validation by library/open access desk
2	20.500.12860/37681.2	2022-05-09T08:30:13Z	validation by imec author
1	20.500.12860/37681*	2021-11-02T15:58:24Z

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