Publication:

Reliability of Mo as Word Line Metal in 3D NAND

Date

2021
Proceedings Paper
https://doi.org/10.1109/irps46558.2021.9405132
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2021015710.pdf 989.55 KB

Author(s)

Tierno, Davide
;
Croes, Kristof
;
Ajaykumar, Arjun
;
Ramesh, Siva
;
Van den Bosch, Geert
;
Rosmeulen, Maarten

Journal

na

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1094 since deposited on 2021-11-02
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1682 since deposited on 2021-11-02
2last month
Acq. date: 2026-09-18

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