Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-07-19
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1678 since deposited on 2021-11-02
Acq. date: 2026-07-19
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Downloads
774 since deposited on 2021-11-02
79last month
56last week
Acq. date: 2026-07-19
Views
1678 since deposited on 2021-11-02
Acq. date: 2026-07-19
Citations