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Reliability of Mo as Word Line Metal in 3D NAND

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314 since deposited on 2021-11-02
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Acq. date: 2026-01-12

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Downloads

314 since deposited on 2021-11-02
59last month
22last week
Acq. date: 2026-01-12

Views

1672 since deposited on 2021-11-02
2last month
2last week
Acq. date: 2026-01-12

Citations