Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-08-10
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Downloads
890 since deposited on 2021-11-02
179last month
43last week
Acq. date: 2026-08-10
Views
1679 since deposited on 2021-11-02
1last month
Acq. date: 2026-08-10
Citations