Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-04-26
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652 since deposited on 2021-11-02
126last month
11last week
Acq. date: 2026-04-26
Views
1676 since deposited on 2021-11-02
1last month
Acq. date: 2026-04-26
Citations