Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2025-12-16
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264 since deposited on 2021-11-02
41last month
13last week
Acq. date: 2025-12-16
Views
1670 since deposited on 2021-11-02
2last month
1last week
Acq. date: 2025-12-16
Citations