Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-05-17
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Downloads
694 since deposited on 2021-11-02
54last month
9last week
Acq. date: 2026-05-17
Views
1678 since deposited on 2021-11-02
2last month
1last week
Acq. date: 2026-05-17
Citations