Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-03-16
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Downloads
500 since deposited on 2021-11-02
89last month
39last week
Acq. date: 2026-03-16
Views
1675 since deposited on 2021-11-02
1last month
Acq. date: 2026-03-16
Citations