Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-08-09
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884 since deposited on 2021-11-02
175last month
40last week
Acq. date: 2026-08-09
Views
1679 since deposited on 2021-11-02
1last month
Acq. date: 2026-08-09
Citations