Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-02-24
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Downloads
423 since deposited on 2021-11-02
73last month
10last week
Acq. date: 2026-02-24
Views
1675 since deposited on 2021-11-02
3last month
1last week
Acq. date: 2026-02-24
Citations