Publication:

Reliability of Mo as Word Line Metal in 3D NAND

Date

2021
Proceedings Paper
https://doi.org/10.1109/IRPS46558.2021.9405132
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dc.contributor.authorTierno, Davide
dc.contributor.authorCroes, Kristof
dc.contributor.authorAjaykumar, Arjun
dc.contributor.authorRamesh, Siva
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorAjaykumar, Arjun
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.date.accessioned2022-06-09T07:12:50Z
dc.date.available2021-11-02T15:58:24Z
dc.date.available2022-05-10T08:30:50Z
dc.date.available2022-06-09T07:12:50Z
dc.date.issued2021
dc.identifier.doi10.1109/IRPS46558.2021.9405132
dc.identifier.eisbn978-1-7281-6893-7
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37681
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationMonterrey, California
dc.source.journalna
dc.source.numberofpages6
dc.title

Reliability of Mo as Word Line Metal in 3D NAND

dc.typeProceedings paper
dspace.entity.typePublication
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