dc.contributor.author | Tavares, J. | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Larsen, Kim Kyllesbech | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Van Rossum, Marc | |
dc.date.accessioned | 2021-09-29T12:48:48Z | |
dc.date.available | 2021-09-29T12:48:48Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/376 | |
dc.source | IIOimport | |
dc.title | Structural characterization of buried epitaxial b-FeSi2 layers in (111) silicon | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Maex, Karen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 639 | |
dc.source.endpage | 640 | |
dc.source.conference | Proceedings of the 13th International Conference on Electron Microscopy - ICEM | |
dc.source.conferencedate | 17/07/1994 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access | |