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Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations
dc.contributor.author | Milojevic, Dragomir | |
dc.contributor.author | Beyne, Eric | |
dc.contributor.author | Van der Plas, Geert | |
dc.contributor.author | Wang, Jane | |
dc.contributor.author | Debacker, Peter | |
dc.date.accessioned | 2021-11-02T15:58:54Z | |
dc.date.available | 2021-11-02T15:58:54Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000671888300019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37728 | |
dc.source | WOS | |
dc.title | Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | Van der Plas, Geert | |
dc.contributor.imecauthor | Wang, Jane | |
dc.contributor.imecauthor | Debacker, Peter | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
dc.contributor.orcidimec | Debacker, Peter::0000-0003-3825-5554 | |
dc.identifier.doi | 10.1117/12.2552036 | |
dc.identifier.eisbn | 978-1-5106-3424-4 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Design-Process-Technology Co-Optimization for Manufacturability XIV | |
dc.source.conferencedate | FEB 26-27, 2020 | |
dc.source.conferencelocation | San Jose | |
dc.source.volume | 11328 | |
imec.availability | Under review |
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