EISBN
978-1-5106-3424-4
ISSN
0277-786X
Conference
Conference on Design-Process-Technology Co-Optimization for Manufacturability XIV
Journal
Proceedings of SPIE
Volume
11328
Title
Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations
Publication type
Proceedings paper