Authors

Richard, Emmanuel; Vervoort, Iwan; Brongersma, Sywert; Beyer, Gerald; Bender, Hugo; Palmans, Roger; Lagrange, Sébastien; Maex, Karen

Conference

Advanced Metallization Conference; September 28-30, 1999; Orlando, FL, USA.

Title

Roles of additive during filling process of damascene structures with electrochemical deposited copper

Publication type

Oral presentation