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Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node

dc.contributor.authorGupta, Anshul
dc.contributor.authorMertens, Hans
dc.contributor.authorTao, Zheng
dc.contributor.authorDemuynck, Steven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorDevriendt, Katia
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorWang, Shouhua
dc.contributor.authorRadisic, Dunja
dc.contributor.authorKenis, Karine
dc.contributor.authorTeugels, Lieve
dc.contributor.authorSebaai, Farid
dc.contributor.authorLorant, Christophe
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorChan, BT
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorSubramanian, Sujith
dc.contributor.authorSchleicher, Filip
dc.contributor.authorHopf, Toby
dc.contributor.authorPeter, Antony
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorDebruyn, Haroen
dc.contributor.authorDemonie, Ingrid
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorChiarella, Thomas
dc.contributor.authorBriggs, Basoene
dc.contributor.authorZhou, Daisy
dc.contributor.authorRosseel, Erik
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorCapogreco, Elena
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorMannaert, Geert
dc.contributor.authorBontemps, N.
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorMertens, Sofie
dc.contributor.authorKim, Min Soo
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorPaolillo, Sara
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorChehab, Bilal
dc.contributor.authorFavia, Paola
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorCousserier, Joris
dc.contributor.authorJaysankar, Manoj
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorMorin, Pierre
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorMitard, Jerome
dc.contributor.authorWilson, Chris
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorTokei, Zsolt
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-12-15T09:56:01Z
dc.date.available2021-11-02T15:59:09Z
dc.date.available2021-12-15T09:56:01Z
dc.date.issued2020
dc.identifier.issn0743-1562
dc.identifier.otherWOS:000668063000097
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37742.2
dc.sourceWOS
dc.titleBuried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node
dc.typeProceedings paper
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorMertens, H.
dc.contributor.imecauthorTao, Z.
dc.contributor.imecauthorDemuynck, S.
dc.contributor.imecauthorBommels, J.
dc.contributor.imecauthorArutchelvan, G.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorPedreira, O. Varela
dc.contributor.imecauthorRitzenthaler, R.
dc.contributor.imecauthorWang, S.
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorKenis, K.
dc.contributor.imecauthorTeugels, L.
dc.contributor.imecauthorSebaai, F.
dc.contributor.imecauthorLorant, C.
dc.contributor.imecauthorJourdan, N.
dc.contributor.imecauthorChan, B. T.
dc.contributor.imecauthorZahedmanesh, H.
dc.contributor.imecauthorSubramanian, S.
dc.contributor.imecauthorSchleicher, F.
dc.contributor.imecauthorHopf, T.
dc.contributor.imecauthorPeter, A.
dc.contributor.imecauthorRassoul, N.
dc.contributor.imecauthorDebruyn, H.
dc.contributor.imecauthorDemonie, I
dc.contributor.imecauthorSiew, Y.
dc.contributor.imecauthorChiarella, T.
dc.contributor.imecauthorBriggs, B.
dc.contributor.imecauthorZhou, D.
dc.contributor.imecauthorRosseel, E.
dc.contributor.imecauthorDe Keersgieter, A.
dc.contributor.imecauthorCapogreco, E.
dc.contributor.imecauthorLitta, E. Dentoni
dc.contributor.imecauthorBoccardi, G.
dc.contributor.imecauthorBaudot, S.
dc.contributor.imecauthorMannaert, G.
dc.contributor.imecauthorBontemps, N.
dc.contributor.imecauthorSepulveda, A.
dc.contributor.imecauthorMertens, S.
dc.contributor.imecauthorKim, M. S.
dc.contributor.imecauthorDupuy, E.
dc.contributor.imecauthorVandersmissen, K.
dc.contributor.imecauthorPaolillo, S.
dc.contributor.imecauthorYakimets, D.
dc.contributor.imecauthorChehab, B.
dc.contributor.imecauthorFavia, P.
dc.contributor.imecauthorDrijbooms, C.
dc.contributor.imecauthorCousserier, J.
dc.contributor.imecauthorJaysankar, M.
dc.contributor.imecauthorLazzarino, F.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorSanchez, E.
dc.contributor.imecauthorMitard, J.
dc.contributor.imecauthorWilson, C.
dc.contributor.imecauthorHolsteyns, F.
dc.contributor.imecauthorTokei, Z.
dc.contributor.imecauthorHoriguchi, N.
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorSubramanian, Sujith
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorDebruyn, Haroen
dc.contributor.imecauthorDemonie, Ingrid
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorZhou, Daisy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorKim, Min Soo
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorCousserier, Joris
dc.contributor.imecauthorJaysankar, Manoj
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.eisbn978-1-7281-6460-1
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceIEEE Symposium on VLSI Technology and Circuits
dc.source.conferencedateJUN 15-19, 2020
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/37742.2*2021-12-15T09:26:55Zvalidation by library/open access desk
120.500.12860/377422021-11-02T15:59:09Z

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