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Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node
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Authors
Gupta, Anshul
;
Mertens, Hans
;
Tao, Zheng
;
Demuynck, Steven
;
Boemmels, Juergen
;
Arutchelvan, Goutham
;
Devriendt, Katia
;
Varela Pedreira, Olalla
;
Ritzenthaler, Romain
;
Wang, Shouhua
;
Radisic, Dunja
;
Kenis, Karine
;
Teugels, Lieve
;
Sebaai, Farid
;
Lorant, Christophe
;
Jourdan, Nicolas
;
Chan, BT
;
Zahedmanesh, Houman
;
Subramanian, Sujith
;
Schleicher, Filip
;
Hopf, Toby
;
Peter, Antony
;
Rassoul, Nouredine
;
Debruyn, Haroen
;
Demonie, Ingrid
;
Siew, Yong Kong
;
Chiarella, Thomas
;
Briggs, Basoene
;
Zhou, Daisy
;
Rosseel, Erik
;
De Keersgieter, An
;
Capogreco, Elena
;
Dentoni Litta, Eugenio
;
Boccardi, Guillaume
;
Baudot, Sylvain
;
Mannaert, Geert
;
Bontemps, N.
;
Sepulveda Marquez, Alfonso
;
Mertens, Sofie
;
Kim, Min Soo
;
Dupuy, Emmanuel
;
Vandersmissen, Kevin
;
Paolillo, Sara
;
Yakimets, Dmitry
;
Chehab, Bilal
;
Favia, Paola
;
Drijbooms, Chris
;
Cousserier, Joris
;
Jaysankar, Manoj
;
Lazzarino, Frederic
;
Morin, Pierre
;
Altamirano Sanchez, Efrain
;
Mitard, Jerome
;
Wilson, Chris
;
Holsteyns, Frank
;
Tokei, Zsolt
;
Horiguchi, Naoto
EISBN
978-1-7281-6460-1
ISSN
0743-1562
Conference
IEEE Symposium on VLSI Technology and Circuits
Journal
na
Title
Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node
Publication type
Proceedings paper
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Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/37742.2
*
2021-12-15T09:26:55Z
validation by library/open access desk
1
20.500.12860/37742
2021-11-02T15:59:09Z
*Selected version
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