Browsing by author "Holsteyns, Frank"

300 mm wafer development for pattern collapse evaluations

Xu, XiuMei; Tao, Zheng; Saib, Mohamed; Sebaai, Farid; Van de Kerkhove, Jeroen; Vrancken, Nandi; Vereecke, Guy; Holsteyns, Frank (2018)

A detailed study of semiconductor wafer drying

Fyen, Wim; Holsteyns, Frank; Bearda, Twan; Arnauts, Sophia; Van Steenbergen, Jan; Doumen, Geert; Kenis, Karine; Mertens, Paul (2004)

A new technique to fabricate ultra-shallow-junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth

Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; Peytier, Ivan; Holsteyns, Frank; Kubicek, Stefan; Verheyen, Peter; Lindsay, Richard; Richard, Olivier (2004)

A new technique to fabricate Ultra-Shallow-Junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth

Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; Peytier, Ivan; Holsteyns, Frank; Kubicek, Stefan; Verheyen, Peter; Lindsay, Richard; Richard, Olivier (2003-01)

A record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

Arimura, Hiroaki; Cott, Daire; Boccardi, Guillaume; Loo, Roger; Wostyn, Kurt; Brus, Stephan; Capogreco, Elena; Opdebeeck, Ann; Witters, Liesbeth; Conard, Thierry; Suhard, Samuel; van Dorp, Dennis; Kenis, Karine; Ragnarsson, Lars-Ake; Mitard, Jerome; Holsteyns, Frank; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine; Horiguchi, Naoto (2019-06)

A study of nanoparticle removal on patterned surfaces

Pacco, Antoine; Holsteyns, Frank; De Gendt, Stefan (2013)

Acoustic cleaning in nano-electronics

Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008)

Advanced wafer surface cleaning technology

Mertens, Paul; Vos, Rita; Vereecke, Guy; Arnauts, Sophia; Bearda, Twan; De Waele, Rita; Eitoku, Atsuro; Fyen, Wim; Geckiere, J.; Hellin, David; Holsteyns, Frank; Kesters, Els; Claes, Martine; Kenis, Karine; Kraus, Harald; Malhouitre, Stephane; Lee, Kuntack; Kocsis, Michael; Onsia, Bart; Garaud, Sylvain; Rip, Jens; Snow, Jim; Teerlinck, I.; Van Hoeymissen, Jan; Barbagini, Francesca; Xu, Kaidong; Paraschiv, Vasile; De Gendt, Stefan; Mannaert, Geert; Heyns, Marc (2004)

An ATR-FTIR based method for dynamic analysis of wetting transitions on superhydrophobic nanostructured surfaces

Vrancken, Nandi; Sergeant, Stefanie; Vereecke, Guy; Doumen, Geert; Holsteyns, Frank; Terryn, Herman; De Gendt, Stefan; Xu, XiuMei (2017)

Application of surface and interface characterization of materials in back-end-of-line interconnect

Le, Quoc Toan; Kesters, Els; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019)

Bare wafer analysis for wet cleaning efficiency – The impact of classification and sensitivity

Wendt, Kay; Wilbers, Fabian; Ruth, Jochen; Lorant, Christophe; Holsteyns, Frank; Newby, John; Bast, Gerhard; Sundar, Vignesh (2018)

BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility

Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Iwasaki, Akihisa; Holsteyns, Frank (2018)

Buried power rail integration with FinFETs for ultimate CMOS scaling

Gupta, Anshul; Varela Pedreira, Olalla; Arutchelvan, Goutham; Zahedmanesh, Houman; Devriendt, Katia; Hanssen, Frederik; Tao, Zheng; Ritzenthaler, Romain; Wang, Shouhua; Radisic, Dunja; Kenis, Karine; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; Jourdan, Nicolas; Chan, BT; Subramanian, Sujith; Schleicher, Filip; Hopf, Toby; Peter, Antony; Rassoul, Nouredine; Debruyn, Haroen; Demonie, Ingrid; Siew, Yong Kong; Chiarella, Thomas; Briggs, Basoene; Zhou, Daisy; Rosseel, Erik; De Keersgieter, An; Capogreco, Elena; Dentoni Litta, Eugenio; Boccardi, Guillaume; Baudot, Sylvain; Mannaert, Geert; Bontemps, Noemie; Sepulveda Marquez, Alfonso; Mertens, Sofie; Kim, Min-Soo; Dupuy, Emmanuel; Vandersmissen, Kevin; Paolillo, Sara; Cousserier, Joris; Yakimets, Dmitry; Lazzarino, Frederic; Chehab, Bilal; Favia, Paola; Drijbooms, Chris; Jaysankar, Manoj; Morin, Pierre; Altamirano Sanchez, Efrain; Mitard, Jerome; Wilson, Chris; Holsteyns, Frank; Boemmels, Juergen; Demuynck, Steven; Tokei, Zsolt; Horiguchi, Naoto (2020)

Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node

Gupta, Anshul; Mertens, Hans; Tao, Zheng; Demuynck, Steven; Boemmels, Juergen; Arutchelvan, Goutham; Devriendt, Katia; Varela Pedreira, Olalla; Ritzenthaler, Romain; Wang, Shouhua; Radisic, Dunja; Kenis, Karine; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; Jourdan, Nicolas; Chan, BT; Zahedmanesh, Houman; Subramanian, Sujith; Schleicher, Filip; Hopf, Toby; Peter, Antony; Rassoul, Nouredine; Debruyn, Haroen; Demonie, Ingrid; Siew, Yong Kong; Chiarella, Thomas; Briggs, Basoene; Zhou, Daisy; Rosseel, Erik; De Keersgieter, An; Capogreco, Elena; Dentoni Litta, Eugenio; Boccardi, Guillaume; Baudot, Sylvain; Mannaert, Geert; Bontemps, N.; Sepulveda Marquez, Alfonso; Mertens, Sofie; Kim, Min Soo; Dupuy, Emmanuel; Vandersmissen, Kevin; Paolillo, Sara; Yakimets, Dmitry; Chehab, Bilal; Favia, Paola; Drijbooms, Chris; Cousserier, Joris; Jaysankar, Manoj; Lazzarino, Frederic; Morin, Pierre; Altamirano Sanchez, Efrain; Mitard, Jerome; Wilson, Chris; Holsteyns, Frank; Tokei, Zsolt; Horiguchi, Naoto (2020)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; tsai, Wei-Kang; Kim, Dong-Wook; Lee, Eunsongyi; Lin, Chang-You; Van Dorpe, Pol; Struyf, Herbert; Holsteyns, Frank; Moshchalkov, Victor; indekeu, joseph; De Gendt, Stefan (2014)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; tsai, Wei-Kang; Kim, Dong-Wook; Lee, Eusonghyi; Lin, Chang You; Van Dorpe, Pol; Struyf, Herbert; Holsteyns, Frank; Moshchalkov, Victor; indekeu, joseph; De Gendt, Stefan (2014)