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Acoustic cleaning in nano-electronics
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Authors
Mertens, Paul
;
Janssens, Tom
;
Holsteyns, Frank
;
Zijlstra, Aaldert
;
Halder, Sandip
;
Wostyn, Kurt
;
Andreas, Michael
;
Hoyer, Ronald
;
Barbagini, Francesca
;
Wada, Masayuki
;
Franklin, Cole
;
Kim, Tae-Gon
;
Kim, K
;
Kenis, Karine
;
Le, Quoc Toan
;
Claes, Martine
;
Kesters, Els
;
Vos, Rita
;
Vereecke, Guy
;
Bearda, Twan
;
Heyns, Marc
Conference
Acoustics
Title
Acoustic cleaning in nano-electronics
Publication type
Proceedings paper
Embargo date
9999-12-31
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