Publication:

Acoustic cleaning in nano-electronics

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMertens, Paul
dc.contributor.authorJanssens, Tom
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorHalder, Sandip
dc.contributor.authorWostyn, Kurt
dc.contributor.authorAndreas, Michael
dc.contributor.authorHoyer, Ronald
dc.contributor.authorBarbagini, Francesca
dc.contributor.authorWada, Masayuki
dc.contributor.authorFranklin, Cole
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorKim, K
dc.contributor.authorKenis, Karine
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorClaes, Martine
dc.contributor.authorKesters, Els
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorBearda, Twan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-17T08:59:53Z
dc.date.available2021-10-17T08:59:53Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14158
dc.source.beginpage556
dc.source.conferenceAcoustics
dc.source.conferencedate29/06/2008
dc.source.conferencelocationParis France
dc.source.endpage560
dc.title

Acoustic cleaning in nano-electronics

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
17842.pdf
Size:
799.6 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions