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Application of surface and interface characterization of materials in back-end-of-line interconnect
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Authors
Le, Quoc Toan
;
Kesters, Els
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
Conference
7th International Workshop on Nanotechnology and Application - IWNA 2019
Title
Application of surface and interface characterization of materials in back-end-of-line interconnect
Publication type
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