Publication:
Application of surface and interface characterization of materials in back-end-of-line interconnect
Date
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Kesters, Els | |
| dc.contributor.author | Altamirano Sanchez, Efrain | |
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Kesters, Els | |
| dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.date.accessioned | 2021-10-27T12:12:04Z | |
| dc.date.available | 2021-10-27T12:12:04Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33385 | |
| dc.source.conference | 7th International Workshop on Nanotechnology and Application - IWNA 2019 | |
| dc.source.conferencedate | 6/11/2019 | |
| dc.source.conferencelocation | Phan Thiet Vietman | |
| dc.title | Application of surface and interface characterization of materials in back-end-of-line interconnect | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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