dc.contributor.author | Krishtab, Mikhail | |
dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Ameloot, Rob | |
dc.date.accessioned | 2022-03-03T14:08:18Z | |
dc.date.available | 2021-11-02T15:59:43Z | |
dc.date.available | 2022-03-03T14:08:18Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.other | WOS:000674333400103 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37774.2 | |
dc.source | WOS | |
dc.title | Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide | |
dc.type | Journal article | |
dc.contributor.imecauthor | Krishtab, Mikhail | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidext | Ameloot, Rob::0000-0003-3178-5480 | |
dc.contributor.orcidimec | Krishtab, Mikhail::0000-0001-6215-8506 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.identifier.doi | 10.1021/acsami.1c04405 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 32381 | |
dc.source.endpage | 32392 | |
dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
dc.identifier.pmid | MEDLINE:34160190 | |
dc.source.issue | 27 | |
dc.source.volume | 13 | |
imec.availability | Published - imec | |