Publication:
Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide
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1928 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-09
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Metrics
Views
1928 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-09
Citations