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Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide
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Authors
Krishtab, Mikhail
;
Armini, Silvia
;
Meersschaut, Johan
;
De Gendt, Stefan
;
Ameloot, Rob
DOI
10.1021/acsami.1c04405
ISSN
1944-8244
PMID
MEDLINE:34160190
Issue
27
Journal
ACS APPLIED MATERIALS & INTERFACES
Volume
13
Title
Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide
Publication type
Journal article
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2
20.500.12860/37774.2
*
2022-03-03T14:06:24Z
validation by library/open access desk
1
20.500.12860/37774
2021-11-02T15:59:43Z
*Selected version
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