Browsing by author "Krishtab, Mikhail"
Now showing items 1-20 of 47
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Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus
Verdonck, Patrick; Wang, Cong; Le, Quoc Toan; Souriau, Laurent; Vanstreels, Kris; Krishtab, Mikhail; Baklanov, Mikhaïl (2014) -
Advanced ultralow-k organosilicate glasses: NEXAFS study
Konashuk, A.; Filatova, E.; Afanasiev, Valeri; Krishtab, Mikhail; Redzheb, Murad; Baklanov, Mikhaïl (2015) -
Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration
Zyulkov, Ivan; Voronina, Ekaterina; Krishtab, Mikhail; Voloshin, Dmitry; Chan, BT; Mankelevich, Yuri; Rakhimova, Tatyana; Armini, Silvia; De Gendt, Stefan (2020) -
Calculation of dielectric constant of porous SiCOH low-k films
Palov, A.; Rakhimova, T; Krishtab, Mikhail; Baklanov, Mikhaïl (2015) -
Comparative analysis of the factors leading to low-k degradation during the integration process
Zotovich, Alexey; Krishtab, Mikhail; Lazzarino, Frederic; Baklanov, Mikhaïl (2014) -
Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide
Krishtab, Mikhail; Armini, Silvia; Meersschaut, Johan; De Gendt, Stefan; Ameloot, Rob (2021) -
Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition
Dictus, Dries; Dordi, Y.; Gurer, E.; Krishtab, Mikhail; Baklanov, Mikhaïl; Carbonell, Laure; van der Veen, Marleen; El-Mekki, Zaid; Tokei, Zsolt (2013) -
Dielectric properties of HKUST-1 SURMOF films
Krishtab, Mikhail; Vanstreels, Kris; Pourtois, Geoffrey; De Gendt, Stefan; Tokei, Zsolt; Baklanov, Mikhaïl; Heinke, Lars; Woell, Christof (2014) -
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
Palov, A; Voronina, E; Rakhimova, T; Lopaev, D; Zyryanov, Sergey M.; Mankelevich, Yu; Krishtab, Mikhail; Baklanov, Mikhaïl (2016) -
Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
Redzheb, Murad; Prager, Lutz; Naumov, Sergej; Armini, Silvia; Voort, Pascal Van Der; Krishtab, Mikhail; Baklanov, Mikhaïl (2016) -
HF etching mechanisms of advanced low-k films
Verdonck, Patrick; Le, Quoc Toan; Krishtab, Mikhail; Vanstreels, Kris; Armini, Silvia; Simone, A.; Nguyen, Mai Phuong; Van Elshocht, Sven; Baklanov, Mikhaïl (2014) -
Impact of curing condition on chemical stability of ultralow-k PMO material
Krishtab, Mikhail; Zhang, Liping; Le, Quoc Toan; Vanstreels, Kris; Souriau, Laurent; Phillips, Mark; Baklanov, Mikhaïl (2012) -
Impact of organic linking and terminal groups on the mechanical properties of self-assembly based low-k dielectrics
Vanstreels, Kris; Krishtab, Mikhail; Garcia Gonzalez, Laura; Armini, Silvia (2017) -
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Sun, Yiting; Krishtab, Mikhail; Struyf, Herbert; Verdonck, Patrick; De Feyter, Steven; Baklanov, Mikhaïl; Armini, Silvia (2014) -
Impact of PVD barrier deposition sequence on ultra low-k dielectrics
Krishtab, Mikhail; Witters, Thomas; De Gendt, Stefan; Baklanov, Mikhaïl (2016) -
Impact of template residues on electrical properties of spin-on ultra low-k dielectrics
Krishtab, Mikhail; Afanasiev, Valeri; Stesmans, Andre; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Impact of UV wavelength and curing time on the properties of spin-coated low-k films
Redzheb, Murad; Prager, Lutz; Krishtab, Mikhail; Armini, Silvia; Vanstreels, Kris; Franquet, Alexis; Van Der Voort, Pascal; Baklanov, Mikhaïl (2015) -
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Krishtab, Mikhail; Vanstreels, Kris; Savage, T.; Matsunaga, K.; De Gendt, Stefan; Baklanov, Mikhaïl (2014) -
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Krishtab, Mikhail; Vanstreels, Kris; Savage, Travis; Matsunaga, Koichi; De Gendt, Stefan; Baklanov, Mikhaïl (2015)