Authors

Sun, Yiting; Krishtab, Mikhail; Struyf, Herbert; Verdonck, Patrick; De Feyter, Steven; Baklanov, Mikhaïl; Armini, Silvia

ISSN

0743-7463

Issue

13

Journal

Langmuir

Volume

30

Title

Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers

Publication type

Journal article

Embargo date

9999-12-31