Publication:
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
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1898 since deposited on 2021-10-22
1last month
Acq. date: 2026-06-01
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1898 since deposited on 2021-10-22
1last month
Acq. date: 2026-06-01
Citations