Publication:
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1881 since deposited on 2021-10-22
Acq. date: 2025-12-09
Citations
Metrics
Views
1881 since deposited on 2021-10-22
Acq. date: 2025-12-09
Citations