Publication:
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1892 since deposited on 2021-10-22
8last month
6last week
Acq. date: 2026-02-24
Citations
Statistics
Views
1892 since deposited on 2021-10-22
8last month
6last week
Acq. date: 2026-02-24
Citations