Publication:

Impact of UV wavelength and curing time on the properties of spin-coated low-k films

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1897 since deposited on 2021-10-22
4last month
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Acq. date: 2026-07-24

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1897 since deposited on 2021-10-22
4last month
2last week
Acq. date: 2026-07-24

Citations