Authors

Redzheb, Murad; Prager, Lutz; Krishtab, Mikhail; Armini, Silvia; Vanstreels, Kris; Franquet, Alexis; Van Der Voort, Pascal; Baklanov, Mikhaïl

Conference

IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM

Title

Impact of UV wavelength and curing time on the properties of spin-coated low-k films

Publication type

Proceedings paper

Embargo date

9999-12-31