Publication:
Impact of UV wavelength and curing time on the properties of spin-coated low-k films
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1896 since deposited on 2021-10-22
3last month
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Acq. date: 2026-07-22
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Statistics
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1896 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2026-07-22
Citations