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Impact of UV wavelength and curing time on the properties of spin-coated low-k films
Publication:
Impact of UV wavelength and curing time on the properties of spin-coated low-k films
Date
2015
Proceedings Paper
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31766.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Redzheb, Murad
;
Prager, Lutz
;
Krishtab, Mikhail
;
Armini, Silvia
;
Vanstreels, Kris
;
Franquet, Alexis
;
Van Der Voort, Pascal
;
Baklanov, Mikhaïl
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Abstract
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1886
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations
Metrics
Views
1886
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations