Authors

Dictus, Dries; Dordi, Y.; Gurer, E.; Krishtab, Mikhail; Baklanov, Mikhaïl; Carbonell, Laure; van der Veen, Marleen; El-Mekki, Zaid; Tokei, Zsolt

Conference

Materials for Advanced Metallization - MAM

Title

Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition

Publication type

Meeting abstract

Embargo date

9999-12-31