Publication:

Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition

Date

2013
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorDictus, Dries
dc.contributor.authorDordi, Y.
dc.contributor.authorGurer, E.
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-21T07:20:27Z
dc.date.available2021-10-21T07:20:27Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22269
dc.source.beginpage261
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate11/03/2013
dc.source.conferencelocationLeuven Belgium
dc.source.endpage262
dc.title

Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
26804.pdf
Size:
1.2 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions