Publication:

Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Files

26804.pdf 1.2 MB

Author(s)

;

;

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Krishtab, Mikhail

;

Baklanov, Mikhaïl

;

Carbonell, Laure

;

van der Veen, Marleen

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Statistics

1898 since deposited on 2021-10-21

Acq. date: 2026-02-24