Calculation of dielectric constant of porous SiCOH low-k films

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Authors

Palov, A.; Rakhimova, T; Krishtab, Mikhail; Baklanov, Mikhaïl

ISSN

1071-1023

Issue

2

Journal

Journal of Vacuum Science and Technology B

Volume

33

Title

Calculation of dielectric constant of porous SiCOH low-k films

Publication type

Journal article

Embargo date

9999-12-31

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