dc.contributor.author | Zahedmanesh, Houman | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2022-09-22T08:12:19Z | |
dc.date.available | 2021-11-02T15:59:57Z | |
dc.date.available | 2022-09-06T12:32:35Z | |
dc.date.available | 2022-09-22T08:12:19Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2574-0970 | |
dc.identifier.other | WOS:000668366800005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37799.3 | |
dc.source | WOS | |
dc.title | Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zahedmanesh, Houman | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Zahedmanesh, Houman::0000-0002-0290-691X | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.identifier.doi | 10.1021/acsanm.1c00773 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 5643 | |
dc.source.endpage | 5648 | |
dc.source.journal | ACS APPLIED NANO MATERIALS | |
dc.source.issue | 6 | |
dc.source.volume | 4 | |
imec.availability | Published - imec | |