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Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication
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Authors
Zahedmanesh, Houman
;
Vega Gonzalez, Victor
;
Tokei, Zsolt
DOI
10.1021/acsanm.1c00773
ISSN
2574-0970
Issue
6
Journal
ACS APPLIED NANO MATERIALS
Volume
4
Title
Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication
Publication type
Journal article
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3
20.500.12860/37799.3
*
2022-09-22T08:11:19Z
validation by library/open access desk
2
20.500.12860/37799.2
2022-03-23T09:03:25Z
validation by imec author
1
20.500.12860/37799
2021-11-02T15:59:57Z
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