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Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Gallagher, Emily | |
dc.contributor.author | Jonckheere, Rik | |
dc.contributor.author | Van Look, Lieve | |
dc.contributor.author | Aubert, Remko | |
dc.contributor.author | Nair, Vineet V. | |
dc.contributor.author | Timmermans, Marina Y. | |
dc.contributor.author | Pollentier, Ivan | |
dc.contributor.author | Hendrickx, Eric | |
dc.contributor.author | Klein, Alexander | |
dc.contributor.author | Yegen, Gokay | |
dc.contributor.author | Broman, Par | |
dc.date.accessioned | 2021-11-02T16:00:21Z | |
dc.date.available | 2021-11-02T16:00:21Z | |
dc.date.issued | 2021-APR | |
dc.identifier.issn | 1932-5150 | |
dc.identifier.other | WOS:000670414000007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37826 | |
dc.source | WOS | |
dc.title | Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Gallagher, Emily | |
dc.contributor.imecauthor | Jonckheere, Rik | |
dc.contributor.imecauthor | Van Look, Lieve | |
dc.contributor.imecauthor | Aubert, Remko | |
dc.contributor.imecauthor | Nair, Vineet V. | |
dc.contributor.imecauthor | Timmermans, Marina Y. | |
dc.contributor.imecauthor | Pollentier, Ivan | |
dc.contributor.imecauthor | Hendrickx, Eric | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.contributor.orcidimec | Gallagher, Emily::0000-0002-2927-8298 | |
dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
dc.identifier.doi | 10.1117/1.JMM.20.2.021005 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | |
dc.source.issue | 2 | |
dc.source.volume | 20 | |
imec.availability | Under review |
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