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Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
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Authors
Bekaert, Joost
;
Gallagher, Emily
;
Jonckheere, Rik
;
Van Look, Lieve
;
Aubert, Remko
;
Klein, Alexander
;
Yegen, Gokay
;
Broman, Par
;
Nair, Vineet Vijayakrishnan
;
Timmermans, Marina
;
Pollentier, Ivan
;
Hendrickx, Eric
DOI
10.1117/1.JMM.20.2.021005
ISSN
1932-5150
Issue
2
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
20
Title
Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
Publication type
Journal article
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Date
Summary
3
20.500.12860/37826.3
*
2022-04-28T14:36:52Z
validation by library/open access desk
2
20.500.12860/37826.2
2022-04-19T07:26:07Z
validation by imec author
1
20.500.12860/37826
2021-11-02T16:00:21Z
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