A BEEM study of PtSi Schottky contacts on ion-milled Si

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Authors
Ru, Guo-Ping; Detavernier, C.; Alves Donaton, Ricardo; Blondeel, A.; Clauws, P.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Qu, X. P.; Zhu, S. Y.; Li, Bing-Zong
Conference
Advanced Interconnects and Contacts
Title
A BEEM study of PtSi Schottky contacts on ion-milled Si
Publication type
Proceedings paper
Embargo date
9999-12-31
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