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Electrodeposition for the synthesis of microsystems

dc.contributor.authorRuythooren, Wouter
dc.contributor.authorAttenborough, Karen
dc.contributor.authorBeerten, Steven
dc.contributor.authorMerken, Patrick
dc.contributor.authorFransaer, J.
dc.contributor.authorBeyne, Eric
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Boeck, Jo
dc.contributor.authorCelis, Jean-Pierre
dc.date.accessioned2021-10-14T11:36:10Z
dc.date.available2021-10-14T11:36:10Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3785
dc.sourceIIOimport
dc.titleElectrodeposition for the synthesis of microsystems
dc.typeProceedings paper
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Boeck, Jo
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage16
dc.source.endpage23
dc.source.conferenceProceedings of Micromechanics Europe
dc.source.conferencedate27/09/1999
dc.source.conferencelocationGif-sur-Yvette France
imec.availabilityPublished - open access


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