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Cumulated charging mechanisms at gate processing in high-kappa first planar NMOS devices
dc.contributor.author | Hiblot, Gaspard | |
dc.contributor.author | Parihar, Narendra | |
dc.contributor.author | Dupuy, Emmanuel | |
dc.contributor.author | Mannaert, Geert | |
dc.contributor.author | Baudot, Sylvain | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | De Heyn, Vincent | |
dc.contributor.author | Mercha, Abdelkarim | |
dc.date.accessioned | 2021-11-02T16:00:57Z | |
dc.date.available | 2021-11-02T16:00:57Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1930-8841 | |
dc.identifier.other | WOS:000659349800011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37865 | |
dc.source | WOS | |
dc.title | Cumulated charging mechanisms at gate processing in high-kappa first planar NMOS devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hiblot, Gaspard | |
dc.contributor.imecauthor | Parihar, Narendra | |
dc.contributor.imecauthor | Dupuy, Emmanuel | |
dc.contributor.imecauthor | Mannaert, Geert | |
dc.contributor.imecauthor | Baudot, Sylvain | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | De Heyn, Vincent | |
dc.contributor.imecauthor | Mercha, Abdelkarim | |
dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
dc.contributor.orcidimec | Dupuy, Emmanuel::0000-0003-3341-1618 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Mercha, Abdelkarim::0000-0002-2174-6958 | |
dc.identifier.doi | 10.1109/IIRW49815.2020.9312853 | |
dc.identifier.eisbn | 978-1-7281-7058-9 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 54 | |
dc.source.endpage | 57 | |
dc.source.conference | IEEE International Integrated Reliability Workshop (IIRW) | |
dc.source.conferencedate | OCT 04-NOV 01, 2020 | |
imec.availability | Under review |
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