Show simple item record

Fluorine in thermal oxides from HF preoxidation surface treatments

dc.contributor.authorRuzyllo, Jerzy
dc.contributor.authorRöhr, Erika
dc.contributor.authorBaeyens, Martien
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:36:19Z
dc.date.available2021-10-14T11:36:19Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3787
dc.sourceIIOimport
dc.titleFluorine in thermal oxides from HF preoxidation surface treatments
dc.typeJournal article
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage336
dc.source.endpage338
dc.source.journalElectrochemical and Solid State Letters
dc.source.issue7
dc.source.volume2
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
3755.pdf
Size:
69.13Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record