Fluorine in thermal oxides from HF preoxidation surface treatments

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Authors

Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Mertens, Paul; Heyns, Marc

Issue

7

Journal

Electrochemical and Solid State Letters

Volume

2

Title

Fluorine in thermal oxides from HF preoxidation surface treatments

Publication type

Journal article

Embargo date

9999-12-31

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