Publication:

Fluorine in thermal oxides from HF preoxidation surface treatments

Date

1999
Journal article
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dc.contributor.authorRuzyllo, Jerzy
dc.contributor.authorRöhr, Erika
dc.contributor.authorBaeyens, Martien
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-10-14T11:36:19Z
dc.date.available2021-10-14T11:36:19Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3787
dc.source.beginpage336
dc.source.endpage338
dc.source.issue7
dc.source.journalElectrochemical and Solid State Letters
dc.source.volume2
dc.title

Fluorine in thermal oxides from HF preoxidation surface treatments

dc.typeJournal article
dspace.entity.typePublication
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