Authors

Ruzyllo, Jerzy; Röhr, Erika; Caymax, Matty; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon

Title

Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process

Publication type

Proceedings paper

Embargo date

9999-12-31