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In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts
dc.contributor.author | Firat, Meric | |
dc.contributor.author | Radhakrishnan, Hariharsudan Sivaramakrishnan | |
dc.contributor.author | Payo, Maria Recaman | |
dc.contributor.author | Duerinckx, Filip | |
dc.contributor.author | Sharma, Rajiv | |
dc.contributor.author | Poortmans, Jef | |
dc.date.accessioned | 2021-11-02T16:01:13Z | |
dc.date.available | 2021-11-02T16:01:13Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0160-8371 | |
dc.identifier.other | WOS:000653077100040 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37881 | |
dc.source | WOS | |
dc.title | In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Firat, Meric | |
dc.contributor.imecauthor | Radhakrishnan, Hariharsudan Sivaramakrishnan | |
dc.contributor.imecauthor | Duerinckx, Filip | |
dc.contributor.imecauthor | Sharma, Rajiv | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.orcidimec | Firat, Meric::0000-0002-6509-9668 | |
dc.contributor.orcidimec | Duerinckx, Filip::0000-0003-2570-7371 | |
dc.contributor.orcidimec | Sharma, Rajiv::0000-0002-6724-1437 | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.identifier.eisbn | 978-1-7281-6115-0 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 160 | |
dc.source.endpage | 163 | |
dc.source.conference | 47th IEEE Photovoltaic Specialists Conference (PVSC) | |
dc.source.conferencedate | JUN 15-AUG 21, 2020 | |
imec.availability | Under review |
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